技术 | Heat - Wet Type
MODEL
Mi2500 BW
CAPACITY
4000slm
APPLICATION
MO,EPI,8G LCD~
MODEL
Mi2000 BW
CAPACITY
3500slm
APPLICATION
MO,EPI,7G LCD
MODEL
1208 BWA
CAPACITY
1000slm
APPLICATION
W-CVD, W-Six,Poly,LCD
MODEL
508 BWA
CAPACITY
508 BWA
APPLICATION
HDP, SA, PE, Furnace, IIP
技术 | Wet - Plasma - Wet Type
MODEL
2000PW
CAPACITY
2000slm
APPLICATION
CVD, Etch(Oxide, Poly).PFCs Treatment(CxFy>90%, CF,>90%)
MODEL
603PW
CAPACITY
500slm
APPLICATION
CVD, Etch(Oxide, Poly).PFCs Treatment(CxFy>90%, CF,>90%)
技术 | FCTO Type
MODEL
700W
CAPACITY
500slm
APPLICATION
HDP,PE-CVD, Furnace,Diff,ALD, Semiconductor
MODEL
2001W
CAPACITY
2000slm
APPLICATION
ALD,AMOLED.LCD
技术 | Burn - Wet Type
MODEL
651FW
CAPACITY
500slm
APPLICATION
PE-CVD,PFCs Treatment
技术 | Wet Type
MODEL
1505W
CAPACITY
1500slm
APPLICATION
EPI Process
MODEL
502W / 505W
CAPACITY
500slm
APPLICATION
Metal Etch/Epi
详细规格请洽本公司或"在线咨询"